8/21/2011	12:17:44 AM	Helium valve closed
8/21/2011	12:17:44 AM	H2 valve closed
8/21/2011	12:17:44 AM	BCl3 valve closed
8/21/2011	12:17:44 AM	PH3 valve closed
8/21/2011	12:17:44 AM	SiCl4 pre valve closed
8/21/2011	12:17:44 AM	SiCl4 post valve closed
8/21/2011	12:17:44 AM	Main Vac valve closed
8/21/2011	12:17:44 AM	Bypass valve closed
8/21/2011	12:17:44 AM	Bubbler valve closed
8/21/2011	12:17:44 AM	Helium MFC set to  0.000000
8/21/2011	12:17:44 AM	H2 MFC set to  0.000000
8/21/2011	12:17:44 AM	BCl3 MFC set to  0.000000
8/21/2011	12:17:44 AM	PHl3 MFC set to  0.000000
8/21/2011	12:17:44 AM	SiCl4 MFC set to  0.000000
8/21/2011	12:17:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	12:17:44 AM	Tube furnace set to 0
8/21/2011	12:17:45 AM	Run finished at 12:17 AM
8/21/2011	1:47:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	1:47:34 AM	Recipe started at 1:47 AM
8/21/2011	1:47:34 AM	Helium valve closed
8/21/2011	1:47:34 AM	H2 valve closed
8/21/2011	1:47:34 AM	BCl3 valve closed
8/21/2011	1:47:34 AM	PH3 valve closed
8/21/2011	1:47:34 AM	SiCl4 pre valve closed
8/21/2011	1:47:34 AM	SiCl4 post valve closed
8/21/2011	1:47:34 AM	Main Vac valve closed
8/21/2011	1:47:34 AM	Bypass valve closed
8/21/2011	1:47:34 AM	Bubbler valve closed
8/21/2011	1:47:34 AM	Helium MFC set to  0.000000
8/21/2011	1:47:34 AM	H2 MFC set to  0.000000
8/21/2011	1:47:34 AM	BCl3 MFC set to  0.000000
8/21/2011	1:47:34 AM	PHl3 MFC set to  0.000000
8/21/2011	1:47:34 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:47:34 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:47:35 AM	Tube furnace set to 0
8/21/2011	1:47:38 AM	H2 valve closed
8/21/2011	1:47:38 AM	BCl3 valve closed
8/21/2011	1:47:38 AM	PH3 valve closed
8/21/2011	1:47:38 AM	SiCl4 pre valve closed
8/21/2011	1:47:38 AM	SiCl4 post valve closed
8/21/2011	1:47:38 AM	Main Vac valve closed
8/21/2011	1:47:38 AM	Bypass valve closed
8/21/2011	1:47:38 AM	Bubbler valve closed
8/21/2011	1:47:38 AM	Helium valve opened
8/21/2011	1:47:38 AM	Helium MFC set to  500.000000
8/21/2011	1:47:38 AM	H2 MFC set to  0.000000
8/21/2011	1:47:38 AM	BCl3 MFC set to  0.000000
8/21/2011	1:47:38 AM	PHl3 MFC set to  0.000000
8/21/2011	1:47:38 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:47:38 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:47:38 AM	Tube furnace set to 0
8/21/2011	1:47:42 AM	Helium valve closed
8/21/2011	1:47:42 AM	H2 valve closed
8/21/2011	1:47:42 AM	BCl3 valve closed
8/21/2011	1:47:42 AM	PH3 valve closed
8/21/2011	1:47:42 AM	SiCl4 pre valve closed
8/21/2011	1:47:42 AM	SiCl4 post valve closed
8/21/2011	1:47:42 AM	Main Vac valve closed
8/21/2011	1:47:42 AM	Bypass valve closed
8/21/2011	1:47:42 AM	Bubbler valve closed
8/21/2011	1:47:42 AM	Helium MFC set to  0.000000
8/21/2011	1:47:42 AM	H2 MFC set to  0.000000
8/21/2011	1:47:42 AM	BCl3 MFC set to  0.000000
8/21/2011	1:47:42 AM	PHl3 MFC set to  0.000000
8/21/2011	1:47:42 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:47:42 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:47:42 AM	Tube furnace set to 0
8/21/2011	1:47:43 AM	Run finished at 1:47 AM
8/21/2011	1:47:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	1:52:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	1:52:38 AM	Recipe started at 1:52 AM
8/21/2011	1:52:38 AM	Helium valve closed
8/21/2011	1:52:38 AM	H2 valve closed
8/21/2011	1:52:38 AM	BCl3 valve closed
8/21/2011	1:52:38 AM	PH3 valve closed
8/21/2011	1:52:38 AM	SiCl4 pre valve closed
8/21/2011	1:52:38 AM	SiCl4 post valve closed
8/21/2011	1:52:38 AM	Main Vac valve closed
8/21/2011	1:52:38 AM	Bubbler valve closed
8/21/2011	1:52:38 AM	Bypass valve opened
8/21/2011	1:52:38 AM	Helium MFC set to  0.000000
8/21/2011	1:52:38 AM	H2 MFC set to  0.000000
8/21/2011	1:52:38 AM	BCl3 MFC set to  0.000000
8/21/2011	1:52:38 AM	PHl3 MFC set to  0.000000
8/21/2011	1:52:38 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:52:38 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:52:38 AM	Tube furnace set to 0
8/21/2011	1:53:43 AM	Helium valve closed
8/21/2011	1:53:43 AM	H2 valve closed
8/21/2011	1:53:43 AM	BCl3 valve closed
8/21/2011	1:53:43 AM	PH3 valve closed
8/21/2011	1:53:43 AM	SiCl4 pre valve closed
8/21/2011	1:53:43 AM	SiCl4 post valve closed
8/21/2011	1:53:43 AM	Main Vac valve closed
8/21/2011	1:53:43 AM	Bubbler valve closed
8/21/2011	1:53:43 AM	Bypass valve opened
8/21/2011	1:53:43 AM	Helium MFC set to  0.000000
8/21/2011	1:53:43 AM	H2 MFC set to  0.000000
8/21/2011	1:53:43 AM	BCl3 MFC set to  0.000000
8/21/2011	1:53:43 AM	PHl3 MFC set to  0.000000
8/21/2011	1:53:43 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:53:43 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:53:43 AM	Tube furnace set to 0
8/21/2011	1:54:43 AM	Helium valve closed
8/21/2011	1:54:43 AM	H2 valve closed
8/21/2011	1:54:43 AM	BCl3 valve closed
8/21/2011	1:54:43 AM	PH3 valve closed
8/21/2011	1:54:43 AM	SiCl4 pre valve closed
8/21/2011	1:54:43 AM	SiCl4 post valve closed
8/21/2011	1:54:43 AM	Bypass valve closed
8/21/2011	1:54:43 AM	Bubbler valve closed
8/21/2011	1:54:43 AM	Main Vac valve opened
8/21/2011	1:54:43 AM	Helium MFC set to  0.000000
8/21/2011	1:54:43 AM	H2 MFC set to  0.000000
8/21/2011	1:54:43 AM	BCl3 MFC set to  0.000000
8/21/2011	1:54:43 AM	PHl3 MFC set to  0.000000
8/21/2011	1:54:43 AM	SiCl4 MFC set to  0.000000
8/21/2011	1:54:43 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	1:54:43 AM	Tube furnace set to 0
8/21/2011	1:54:44 AM	Run finished at 1:54 AM
8/21/2011	1:54:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	3:02:38 AM	Main Vac valve closed
8/21/2011	3:02:50 AM	Main Vac valve opened
8/21/2011	3:03:34 AM	Recipe started at 3:03 AM
8/21/2011	3:03:34 AM	Helium valve closed
8/21/2011	3:03:34 AM	H2 valve closed
8/21/2011	3:03:34 AM	BCl3 valve closed
8/21/2011	3:03:34 AM	PH3 valve closed
8/21/2011	3:03:34 AM	SiCl4 pre valve closed
8/21/2011	3:03:34 AM	SiCl4 post valve closed
8/21/2011	3:03:34 AM	Main Vac valve closed
8/21/2011	3:03:34 AM	Bypass valve closed
8/21/2011	3:03:34 AM	Bubbler valve closed
8/21/2011	3:03:34 AM	Helium MFC set to  0.000000
8/21/2011	3:03:34 AM	H2 MFC set to  0.000000
8/21/2011	3:03:34 AM	BCl3 MFC set to  0.000000
8/21/2011	3:03:34 AM	PHl3 MFC set to  0.000000
8/21/2011	3:03:34 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:03:34 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:03:34 AM	Tube furnace set to 0
8/21/2011	3:03:37 AM	Helium valve closed
8/21/2011	3:03:37 AM	BCl3 valve closed
8/21/2011	3:03:37 AM	PH3 valve closed
8/21/2011	3:03:37 AM	SiCl4 pre valve closed
8/21/2011	3:03:37 AM	SiCl4 post valve closed
8/21/2011	3:03:37 AM	Main Vac valve closed
8/21/2011	3:03:37 AM	Bypass valve closed
8/21/2011	3:03:37 AM	Bubbler valve closed
8/21/2011	3:03:37 AM	H2 valve opened
8/21/2011	3:03:37 AM	Helium MFC set to  0.000000
8/21/2011	3:03:37 AM	H2 MFC set to  500.000000
8/21/2011	3:03:37 AM	BCl3 MFC set to  0.000000
8/21/2011	3:03:37 AM	PHl3 MFC set to  0.000000
8/21/2011	3:03:37 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:03:37 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:03:38 AM	Tube furnace set to 0
8/21/2011	3:04:42 AM	Helium valve closed
8/21/2011	3:04:42 AM	BCl3 valve closed
8/21/2011	3:04:42 AM	PH3 valve closed
8/21/2011	3:04:42 AM	SiCl4 pre valve closed
8/21/2011	3:04:42 AM	SiCl4 post valve closed
8/21/2011	3:04:42 AM	Main Vac valve closed
8/21/2011	3:04:42 AM	Bypass valve closed
8/21/2011	3:04:42 AM	H2 valve opened
8/21/2011	3:04:42 AM	Bubbler valve opened
8/21/2011	3:04:42 AM	Helium MFC set to  0.000000
8/21/2011	3:04:42 AM	H2 MFC set to  500.000000
8/21/2011	3:04:42 AM	BCl3 MFC set to  0.000000
8/21/2011	3:04:42 AM	PHl3 MFC set to  0.000000
8/21/2011	3:04:42 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:04:42 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:04:42 AM	Tube furnace set to 0
8/21/2011	3:04:44 AM	Helium valve closed
8/21/2011	3:04:44 AM	BCl3 valve closed
8/21/2011	3:04:44 AM	PH3 valve closed
8/21/2011	3:04:44 AM	SiCl4 pre valve closed
8/21/2011	3:04:44 AM	SiCl4 post valve closed
8/21/2011	3:04:44 AM	Main Vac valve closed
8/21/2011	3:04:44 AM	Bypass valve closed
8/21/2011	3:04:44 AM	H2 valve opened
8/21/2011	3:04:44 AM	Bubbler valve opened
8/21/2011	3:04:44 AM	Helium MFC set to  0.000000
8/21/2011	3:04:44 AM	H2 MFC set to  500.000000
8/21/2011	3:04:44 AM	BCl3 MFC set to  0.000000
8/21/2011	3:04:44 AM	PHl3 MFC set to  0.000000
8/21/2011	3:04:44 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:04:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:04:44 AM	Tube furnace set to 1000
8/21/2011	3:29:44 AM	Helium valve closed
8/21/2011	3:29:44 AM	PH3 valve closed
8/21/2011	3:29:44 AM	Main Vac valve closed
8/21/2011	3:29:44 AM	Bypass valve closed
8/21/2011	3:29:44 AM	H2 valve opened
8/21/2011	3:29:44 AM	BCl3 valve opened
8/21/2011	3:29:44 AM	SiCl4 pre valve opened
8/21/2011	3:29:44 AM	SiCl4 post valve opened
8/21/2011	3:29:44 AM	Bubbler valve opened
8/21/2011	3:29:44 AM	Helium MFC set to  0.000000
8/21/2011	3:29:44 AM	H2 MFC set to  500.000000
8/21/2011	3:29:44 AM	BCl3 MFC set to  2.500000
8/21/2011	3:29:44 AM	PHl3 MFC set to  0.000000
8/21/2011	3:29:44 AM	SiCl4 MFC set to  50.000000
8/21/2011	3:29:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:29:44 AM	Tube furnace set to 1000
8/21/2011	3:43:44 AM	Helium valve closed
8/21/2011	3:43:44 AM	BCl3 valve closed
8/21/2011	3:43:44 AM	PH3 valve closed
8/21/2011	3:43:44 AM	SiCl4 pre valve closed
8/21/2011	3:43:44 AM	SiCl4 post valve closed
8/21/2011	3:43:44 AM	Main Vac valve closed
8/21/2011	3:43:44 AM	Bypass valve closed
8/21/2011	3:43:44 AM	H2 valve opened
8/21/2011	3:43:44 AM	Bubbler valve opened
8/21/2011	3:43:44 AM	Helium MFC set to  0.000000
8/21/2011	3:43:44 AM	H2 MFC set to  500.000000
8/21/2011	3:43:44 AM	BCl3 MFC set to  0.000000
8/21/2011	3:43:44 AM	PHl3 MFC set to  0.000000
8/21/2011	3:43:44 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:43:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:43:44 AM	Tube furnace set to 750
8/21/2011	3:48:44 AM	H2 valve closed
8/21/2011	3:48:44 AM	BCl3 valve closed
8/21/2011	3:48:44 AM	PH3 valve closed
8/21/2011	3:48:44 AM	SiCl4 pre valve closed
8/21/2011	3:48:44 AM	SiCl4 post valve closed
8/21/2011	3:48:44 AM	Main Vac valve closed
8/21/2011	3:48:44 AM	Bypass valve closed
8/21/2011	3:48:44 AM	Helium valve opened
8/21/2011	3:48:44 AM	Bubbler valve opened
8/21/2011	3:48:44 AM	Helium MFC set to  500.000000
8/21/2011	3:48:44 AM	H2 MFC set to  0.000000
8/21/2011	3:48:44 AM	BCl3 MFC set to  0.000000
8/21/2011	3:48:44 AM	PHl3 MFC set to  0.000000
8/21/2011	3:48:44 AM	SiCl4 MFC set to  0.000000
8/21/2011	3:48:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	3:48:44 AM	Tube furnace set to 0
8/21/2011	4:08:44 AM	Helium valve closed
8/21/2011	4:08:44 AM	H2 valve closed
8/21/2011	4:08:44 AM	BCl3 valve closed
8/21/2011	4:08:44 AM	PH3 valve closed
8/21/2011	4:08:44 AM	SiCl4 pre valve closed
8/21/2011	4:08:44 AM	SiCl4 post valve closed
8/21/2011	4:08:44 AM	Main Vac valve closed
8/21/2011	4:08:44 AM	Bypass valve closed
8/21/2011	4:08:44 AM	Bubbler valve closed
8/21/2011	4:08:44 AM	Helium MFC set to  0.000000
8/21/2011	4:08:44 AM	H2 MFC set to  0.000000
8/21/2011	4:08:44 AM	BCl3 MFC set to  0.000000
8/21/2011	4:08:44 AM	PHl3 MFC set to  0.000000
8/21/2011	4:08:44 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:08:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:08:44 AM	Tube furnace set to 0
8/21/2011	4:08:45 AM	Run finished at 4:08 AM
8/21/2011	4:49:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	4:49:56 AM	Recipe started at 4:49 AM
8/21/2011	4:49:56 AM	Helium valve closed
8/21/2011	4:49:56 AM	H2 valve closed
8/21/2011	4:49:56 AM	BCl3 valve closed
8/21/2011	4:49:56 AM	PH3 valve closed
8/21/2011	4:49:56 AM	SiCl4 pre valve closed
8/21/2011	4:49:56 AM	SiCl4 post valve closed
8/21/2011	4:49:56 AM	Main Vac valve closed
8/21/2011	4:49:56 AM	Bypass valve closed
8/21/2011	4:49:56 AM	Bubbler valve closed
8/21/2011	4:49:56 AM	Helium MFC set to  0.000000
8/21/2011	4:49:56 AM	H2 MFC set to  0.000000
8/21/2011	4:49:56 AM	BCl3 MFC set to  0.000000
8/21/2011	4:49:56 AM	PHl3 MFC set to  0.000000
8/21/2011	4:49:56 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:49:56 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:49:57 AM	Tube furnace set to 0
8/21/2011	4:50:00 AM	H2 valve closed
8/21/2011	4:50:00 AM	BCl3 valve closed
8/21/2011	4:50:00 AM	PH3 valve closed
8/21/2011	4:50:00 AM	SiCl4 pre valve closed
8/21/2011	4:50:00 AM	SiCl4 post valve closed
8/21/2011	4:50:00 AM	Main Vac valve closed
8/21/2011	4:50:00 AM	Bypass valve closed
8/21/2011	4:50:00 AM	Bubbler valve closed
8/21/2011	4:50:00 AM	Helium valve opened
8/21/2011	4:50:00 AM	Helium MFC set to  500.000000
8/21/2011	4:50:00 AM	H2 MFC set to  0.000000
8/21/2011	4:50:00 AM	BCl3 MFC set to  0.000000
8/21/2011	4:50:00 AM	PHl3 MFC set to  0.000000
8/21/2011	4:50:00 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:50:00 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:50:00 AM	Tube furnace set to 0
8/21/2011	4:50:06 AM	Helium valve closed
8/21/2011	4:50:06 AM	H2 valve closed
8/21/2011	4:50:06 AM	BCl3 valve closed
8/21/2011	4:50:06 AM	PH3 valve closed
8/21/2011	4:50:06 AM	SiCl4 pre valve closed
8/21/2011	4:50:06 AM	SiCl4 post valve closed
8/21/2011	4:50:06 AM	Main Vac valve closed
8/21/2011	4:50:06 AM	Bypass valve closed
8/21/2011	4:50:06 AM	Bubbler valve closed
8/21/2011	4:50:06 AM	Helium MFC set to  0.000000
8/21/2011	4:50:06 AM	H2 MFC set to  0.000000
8/21/2011	4:50:06 AM	BCl3 MFC set to  0.000000
8/21/2011	4:50:06 AM	PHl3 MFC set to  0.000000
8/21/2011	4:50:06 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:50:06 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:50:06 AM	Tube furnace set to 0
8/21/2011	4:50:07 AM	Run finished at 4:50 AM
8/21/2011	4:50:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	4:54:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	4:54:15 AM	Recipe started at 4:54 AM
8/21/2011	4:54:15 AM	Helium valve closed
8/21/2011	4:54:15 AM	H2 valve closed
8/21/2011	4:54:15 AM	BCl3 valve closed
8/21/2011	4:54:15 AM	PH3 valve closed
8/21/2011	4:54:15 AM	SiCl4 pre valve closed
8/21/2011	4:54:15 AM	SiCl4 post valve closed
8/21/2011	4:54:15 AM	Main Vac valve closed
8/21/2011	4:54:15 AM	Bubbler valve closed
8/21/2011	4:54:15 AM	Bypass valve opened
8/21/2011	4:54:15 AM	Helium MFC set to  0.000000
8/21/2011	4:54:15 AM	H2 MFC set to  0.000000
8/21/2011	4:54:15 AM	BCl3 MFC set to  0.000000
8/21/2011	4:54:15 AM	PHl3 MFC set to  0.000000
8/21/2011	4:54:15 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:54:15 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:54:15 AM	Tube furnace set to 0
8/21/2011	4:55:18 AM	Helium valve closed
8/21/2011	4:55:18 AM	H2 valve closed
8/21/2011	4:55:18 AM	BCl3 valve closed
8/21/2011	4:55:18 AM	PH3 valve closed
8/21/2011	4:55:18 AM	SiCl4 pre valve closed
8/21/2011	4:55:18 AM	SiCl4 post valve closed
8/21/2011	4:55:18 AM	Main Vac valve closed
8/21/2011	4:55:18 AM	Bubbler valve closed
8/21/2011	4:55:18 AM	Bypass valve opened
8/21/2011	4:55:18 AM	Helium MFC set to  0.000000
8/21/2011	4:55:18 AM	H2 MFC set to  0.000000
8/21/2011	4:55:18 AM	BCl3 MFC set to  0.000000
8/21/2011	4:55:18 AM	PHl3 MFC set to  0.000000
8/21/2011	4:55:18 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:55:18 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:55:18 AM	Tube furnace set to 0
8/21/2011	4:56:19 AM	Helium valve closed
8/21/2011	4:56:19 AM	H2 valve closed
8/21/2011	4:56:19 AM	BCl3 valve closed
8/21/2011	4:56:19 AM	PH3 valve closed
8/21/2011	4:56:19 AM	SiCl4 pre valve closed
8/21/2011	4:56:19 AM	SiCl4 post valve closed
8/21/2011	4:56:19 AM	Bypass valve closed
8/21/2011	4:56:19 AM	Bubbler valve closed
8/21/2011	4:56:19 AM	Main Vac valve opened
8/21/2011	4:56:19 AM	Helium MFC set to  0.000000
8/21/2011	4:56:19 AM	H2 MFC set to  0.000000
8/21/2011	4:56:19 AM	BCl3 MFC set to  0.000000
8/21/2011	4:56:19 AM	PHl3 MFC set to  0.000000
8/21/2011	4:56:19 AM	SiCl4 MFC set to  0.000000
8/21/2011	4:56:19 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	4:56:19 AM	Tube furnace set to 0
8/21/2011	4:56:20 AM	Run finished at 4:56 AM
8/21/2011	4:56:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	4:59:45 AM	Tube furnace set to 150
8/21/2011	6:04:59 AM	Main Vac valve closed
8/21/2011	6:05:08 AM	Main Vac valve opened
8/21/2011	6:06:27 AM	Recipe started at 6:06 AM
8/21/2011	6:06:27 AM	Helium valve closed
8/21/2011	6:06:27 AM	H2 valve closed
8/21/2011	6:06:27 AM	BCl3 valve closed
8/21/2011	6:06:27 AM	PH3 valve closed
8/21/2011	6:06:27 AM	SiCl4 pre valve closed
8/21/2011	6:06:27 AM	SiCl4 post valve closed
8/21/2011	6:06:27 AM	Main Vac valve closed
8/21/2011	6:06:27 AM	Bypass valve closed
8/21/2011	6:06:27 AM	Bubbler valve closed
8/21/2011	6:06:27 AM	Helium MFC set to  0.000000
8/21/2011	6:06:27 AM	H2 MFC set to  0.000000
8/21/2011	6:06:27 AM	BCl3 MFC set to  0.000000
8/21/2011	6:06:27 AM	PHl3 MFC set to  0.000000
8/21/2011	6:06:27 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:06:27 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:06:27 AM	Tube furnace set to 0
8/21/2011	6:06:30 AM	Helium valve closed
8/21/2011	6:06:30 AM	BCl3 valve closed
8/21/2011	6:06:30 AM	PH3 valve closed
8/21/2011	6:06:30 AM	SiCl4 pre valve closed
8/21/2011	6:06:30 AM	SiCl4 post valve closed
8/21/2011	6:06:30 AM	Main Vac valve closed
8/21/2011	6:06:30 AM	Bypass valve closed
8/21/2011	6:06:30 AM	Bubbler valve closed
8/21/2011	6:06:30 AM	H2 valve opened
8/21/2011	6:06:30 AM	Helium MFC set to  0.000000
8/21/2011	6:06:30 AM	H2 MFC set to  500.000000
8/21/2011	6:06:30 AM	BCl3 MFC set to  0.000000
8/21/2011	6:06:30 AM	PHl3 MFC set to  0.000000
8/21/2011	6:06:30 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:06:30 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:06:31 AM	Tube furnace set to 0
8/21/2011	6:07:34 AM	Helium valve closed
8/21/2011	6:07:34 AM	BCl3 valve closed
8/21/2011	6:07:34 AM	PH3 valve closed
8/21/2011	6:07:34 AM	SiCl4 pre valve closed
8/21/2011	6:07:34 AM	SiCl4 post valve closed
8/21/2011	6:07:34 AM	Main Vac valve closed
8/21/2011	6:07:34 AM	Bypass valve closed
8/21/2011	6:07:34 AM	H2 valve opened
8/21/2011	6:07:34 AM	Bubbler valve opened
8/21/2011	6:07:34 AM	Helium MFC set to  0.000000
8/21/2011	6:07:34 AM	H2 MFC set to  500.000000
8/21/2011	6:07:34 AM	BCl3 MFC set to  0.000000
8/21/2011	6:07:34 AM	PHl3 MFC set to  0.000000
8/21/2011	6:07:34 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:07:34 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:07:34 AM	Tube furnace set to 0
8/21/2011	6:07:35 AM	Helium valve closed
8/21/2011	6:07:35 AM	BCl3 valve closed
8/21/2011	6:07:35 AM	PH3 valve closed
8/21/2011	6:07:35 AM	SiCl4 pre valve closed
8/21/2011	6:07:35 AM	SiCl4 post valve closed
8/21/2011	6:07:35 AM	Main Vac valve closed
8/21/2011	6:07:35 AM	Bypass valve closed
8/21/2011	6:07:35 AM	H2 valve opened
8/21/2011	6:07:35 AM	Bubbler valve opened
8/21/2011	6:07:35 AM	Helium MFC set to  0.000000
8/21/2011	6:07:35 AM	H2 MFC set to  500.000000
8/21/2011	6:07:35 AM	BCl3 MFC set to  0.000000
8/21/2011	6:07:35 AM	PHl3 MFC set to  0.000000
8/21/2011	6:07:35 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:07:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:07:35 AM	Tube furnace set to 1000
8/21/2011	6:32:35 AM	Helium valve closed
8/21/2011	6:32:35 AM	PH3 valve closed
8/21/2011	6:32:35 AM	Main Vac valve closed
8/21/2011	6:32:35 AM	Bypass valve closed
8/21/2011	6:32:35 AM	H2 valve opened
8/21/2011	6:32:35 AM	BCl3 valve opened
8/21/2011	6:32:35 AM	SiCl4 pre valve opened
8/21/2011	6:32:35 AM	SiCl4 post valve opened
8/21/2011	6:32:35 AM	Bubbler valve opened
8/21/2011	6:32:35 AM	Helium MFC set to  0.000000
8/21/2011	6:32:35 AM	H2 MFC set to  500.000000
8/21/2011	6:32:35 AM	BCl3 MFC set to  2.500000
8/21/2011	6:32:35 AM	PHl3 MFC set to  0.000000
8/21/2011	6:32:35 AM	SiCl4 MFC set to  50.000000
8/21/2011	6:32:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:32:35 AM	Tube furnace set to 1000
8/21/2011	6:44:35 AM	Helium valve closed
8/21/2011	6:44:35 AM	BCl3 valve closed
8/21/2011	6:44:35 AM	PH3 valve closed
8/21/2011	6:44:35 AM	SiCl4 pre valve closed
8/21/2011	6:44:35 AM	SiCl4 post valve closed
8/21/2011	6:44:35 AM	Main Vac valve closed
8/21/2011	6:44:35 AM	Bypass valve closed
8/21/2011	6:44:35 AM	H2 valve opened
8/21/2011	6:44:35 AM	Bubbler valve opened
8/21/2011	6:44:35 AM	Helium MFC set to  0.000000
8/21/2011	6:44:35 AM	H2 MFC set to  500.000000
8/21/2011	6:44:35 AM	BCl3 MFC set to  0.000000
8/21/2011	6:44:35 AM	PHl3 MFC set to  0.000000
8/21/2011	6:44:35 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:44:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:44:35 AM	Tube furnace set to 750
8/21/2011	6:49:35 AM	H2 valve closed
8/21/2011	6:49:35 AM	BCl3 valve closed
8/21/2011	6:49:35 AM	PH3 valve closed
8/21/2011	6:49:35 AM	SiCl4 pre valve closed
8/21/2011	6:49:35 AM	SiCl4 post valve closed
8/21/2011	6:49:35 AM	Main Vac valve closed
8/21/2011	6:49:35 AM	Bypass valve closed
8/21/2011	6:49:35 AM	Helium valve opened
8/21/2011	6:49:35 AM	Bubbler valve opened
8/21/2011	6:49:35 AM	Helium MFC set to  500.000000
8/21/2011	6:49:35 AM	H2 MFC set to  0.000000
8/21/2011	6:49:35 AM	BCl3 MFC set to  0.000000
8/21/2011	6:49:35 AM	PHl3 MFC set to  0.000000
8/21/2011	6:49:35 AM	SiCl4 MFC set to  0.000000
8/21/2011	6:49:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	6:49:35 AM	Tube furnace set to 0
8/21/2011	7:09:35 AM	Helium valve closed
8/21/2011	7:09:35 AM	H2 valve closed
8/21/2011	7:09:35 AM	BCl3 valve closed
8/21/2011	7:09:35 AM	PH3 valve closed
8/21/2011	7:09:35 AM	SiCl4 pre valve closed
8/21/2011	7:09:35 AM	SiCl4 post valve closed
8/21/2011	7:09:35 AM	Main Vac valve closed
8/21/2011	7:09:35 AM	Bypass valve closed
8/21/2011	7:09:35 AM	Bubbler valve closed
8/21/2011	7:09:35 AM	Helium MFC set to  0.000000
8/21/2011	7:09:35 AM	H2 MFC set to  0.000000
8/21/2011	7:09:35 AM	BCl3 MFC set to  0.000000
8/21/2011	7:09:35 AM	PHl3 MFC set to  0.000000
8/21/2011	7:09:35 AM	SiCl4 MFC set to  0.000000
8/21/2011	7:09:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:09:36 AM	Tube furnace set to 0
8/21/2011	7:09:37 AM	Run finished at 7:09 AM
8/21/2011	8:05:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	8:05:45 AM	Recipe started at 8:05 AM
8/21/2011	8:05:45 AM	Helium valve closed
8/21/2011	8:05:45 AM	H2 valve closed
8/21/2011	8:05:45 AM	BCl3 valve closed
8/21/2011	8:05:45 AM	PH3 valve closed
8/21/2011	8:05:45 AM	SiCl4 pre valve closed
8/21/2011	8:05:45 AM	SiCl4 post valve closed
8/21/2011	8:05:45 AM	Main Vac valve closed
8/21/2011	8:05:45 AM	Bypass valve closed
8/21/2011	8:05:45 AM	Bubbler valve closed
8/21/2011	8:05:45 AM	Helium MFC set to  0.000000
8/21/2011	8:05:45 AM	H2 MFC set to  0.000000
8/21/2011	8:05:45 AM	BCl3 MFC set to  0.000000
8/21/2011	8:05:45 AM	PHl3 MFC set to  0.000000
8/21/2011	8:05:45 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:05:45 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:05:45 AM	Tube furnace set to 0
8/21/2011	8:05:48 AM	H2 valve closed
8/21/2011	8:05:48 AM	BCl3 valve closed
8/21/2011	8:05:48 AM	PH3 valve closed
8/21/2011	8:05:48 AM	SiCl4 pre valve closed
8/21/2011	8:05:48 AM	SiCl4 post valve closed
8/21/2011	8:05:48 AM	Main Vac valve closed
8/21/2011	8:05:48 AM	Bypass valve closed
8/21/2011	8:05:48 AM	Bubbler valve closed
8/21/2011	8:05:48 AM	Helium valve opened
8/21/2011	8:05:48 AM	Helium MFC set to  500.000000
8/21/2011	8:05:48 AM	H2 MFC set to  0.000000
8/21/2011	8:05:48 AM	BCl3 MFC set to  0.000000
8/21/2011	8:05:48 AM	PHl3 MFC set to  0.000000
8/21/2011	8:05:48 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:05:48 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:05:48 AM	Tube furnace set to 0
8/21/2011	8:05:53 AM	Helium valve closed
8/21/2011	8:05:53 AM	H2 valve closed
8/21/2011	8:05:53 AM	BCl3 valve closed
8/21/2011	8:05:53 AM	PH3 valve closed
8/21/2011	8:05:53 AM	SiCl4 pre valve closed
8/21/2011	8:05:53 AM	SiCl4 post valve closed
8/21/2011	8:05:53 AM	Main Vac valve closed
8/21/2011	8:05:53 AM	Bypass valve closed
8/21/2011	8:05:53 AM	Bubbler valve closed
8/21/2011	8:05:53 AM	Helium MFC set to  0.000000
8/21/2011	8:05:53 AM	H2 MFC set to  0.000000
8/21/2011	8:05:53 AM	BCl3 MFC set to  0.000000
8/21/2011	8:05:53 AM	PHl3 MFC set to  0.000000
8/21/2011	8:05:53 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:05:53 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:05:54 AM	Tube furnace set to 0
8/21/2011	8:05:55 AM	Run finished at 8:05 AM
8/21/2011	8:05:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2011	8:08:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	8:08:48 AM	Recipe started at 8:08 AM
8/21/2011	8:08:48 AM	Helium valve closed
8/21/2011	8:08:48 AM	H2 valve closed
8/21/2011	8:08:48 AM	BCl3 valve closed
8/21/2011	8:08:48 AM	PH3 valve closed
8/21/2011	8:08:48 AM	SiCl4 pre valve closed
8/21/2011	8:08:48 AM	SiCl4 post valve closed
8/21/2011	8:08:48 AM	Main Vac valve closed
8/21/2011	8:08:48 AM	Bubbler valve closed
8/21/2011	8:08:48 AM	Bypass valve opened
8/21/2011	8:08:48 AM	Helium MFC set to  0.000000
8/21/2011	8:08:48 AM	H2 MFC set to  0.000000
8/21/2011	8:08:48 AM	BCl3 MFC set to  0.000000
8/21/2011	8:08:48 AM	PHl3 MFC set to  0.000000
8/21/2011	8:08:48 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:08:48 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:08:49 AM	Tube furnace set to 0
8/21/2011	8:09:50 AM	Helium valve closed
8/21/2011	8:09:50 AM	H2 valve closed
8/21/2011	8:09:50 AM	BCl3 valve closed
8/21/2011	8:09:50 AM	PH3 valve closed
8/21/2011	8:09:50 AM	SiCl4 pre valve closed
8/21/2011	8:09:50 AM	SiCl4 post valve closed
8/21/2011	8:09:50 AM	Main Vac valve closed
8/21/2011	8:09:50 AM	Bubbler valve closed
8/21/2011	8:09:50 AM	Bypass valve opened
8/21/2011	8:09:50 AM	Helium MFC set to  0.000000
8/21/2011	8:09:50 AM	H2 MFC set to  0.000000
8/21/2011	8:09:50 AM	BCl3 MFC set to  0.000000
8/21/2011	8:09:50 AM	PHl3 MFC set to  0.000000
8/21/2011	8:09:50 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:09:50 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:09:50 AM	Tube furnace set to 0
8/21/2011	8:10:50 AM	Helium valve closed
8/21/2011	8:10:50 AM	H2 valve closed
8/21/2011	8:10:50 AM	BCl3 valve closed
8/21/2011	8:10:50 AM	PH3 valve closed
8/21/2011	8:10:50 AM	SiCl4 pre valve closed
8/21/2011	8:10:50 AM	SiCl4 post valve closed
8/21/2011	8:10:50 AM	Bypass valve closed
8/21/2011	8:10:50 AM	Bubbler valve closed
8/21/2011	8:10:50 AM	Main Vac valve opened
8/21/2011	8:10:50 AM	Helium MFC set to  0.000000
8/21/2011	8:10:50 AM	H2 MFC set to  0.000000
8/21/2011	8:10:50 AM	BCl3 MFC set to  0.000000
8/21/2011	8:10:50 AM	PHl3 MFC set to  0.000000
8/21/2011	8:10:50 AM	SiCl4 MFC set to  0.000000
8/21/2011	8:10:50 AM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:10:50 AM	Tube furnace set to 0
8/21/2011	8:10:51 AM	Run finished at 8:10 AM
8/21/2011	8:10:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2011	7:17:13 PM	Main Vac valve closed
8/21/2011	7:17:31 PM	Main Vac valve opened
8/21/2011	7:18:11 PM	Recipe started at 7:18 PM
8/21/2011	7:18:11 PM	Helium valve closed
8/21/2011	7:18:11 PM	H2 valve closed
8/21/2011	7:18:11 PM	BCl3 valve closed
8/21/2011	7:18:11 PM	PH3 valve closed
8/21/2011	7:18:11 PM	SiCl4 pre valve closed
8/21/2011	7:18:11 PM	SiCl4 post valve closed
8/21/2011	7:18:11 PM	Main Vac valve closed
8/21/2011	7:18:11 PM	Bypass valve closed
8/21/2011	7:18:11 PM	Bubbler valve closed
8/21/2011	7:18:11 PM	Helium MFC set to  0.000000
8/21/2011	7:18:11 PM	H2 MFC set to  0.000000
8/21/2011	7:18:11 PM	BCl3 MFC set to  0.000000
8/21/2011	7:18:11 PM	PHl3 MFC set to  0.000000
8/21/2011	7:18:11 PM	SiCl4 MFC set to  0.000000
8/21/2011	7:18:11 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:18:11 PM	Tube furnace set to 0
8/21/2011	7:18:14 PM	Helium valve closed
8/21/2011	7:18:14 PM	BCl3 valve closed
8/21/2011	7:18:14 PM	PH3 valve closed
8/21/2011	7:18:14 PM	SiCl4 pre valve closed
8/21/2011	7:18:14 PM	SiCl4 post valve closed
8/21/2011	7:18:14 PM	Main Vac valve closed
8/21/2011	7:18:14 PM	Bypass valve closed
8/21/2011	7:18:14 PM	Bubbler valve closed
8/21/2011	7:18:14 PM	H2 valve opened
8/21/2011	7:18:14 PM	Helium MFC set to  0.000000
8/21/2011	7:18:14 PM	H2 MFC set to  500.000000
8/21/2011	7:18:14 PM	BCl3 MFC set to  0.000000
8/21/2011	7:18:14 PM	PHl3 MFC set to  0.000000
8/21/2011	7:18:14 PM	SiCl4 MFC set to  0.000000
8/21/2011	7:18:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:18:14 PM	Tube furnace set to 0
8/21/2011	7:19:21 PM	Helium valve closed
8/21/2011	7:19:21 PM	BCl3 valve closed
8/21/2011	7:19:21 PM	PH3 valve closed
8/21/2011	7:19:21 PM	SiCl4 pre valve closed
8/21/2011	7:19:21 PM	SiCl4 post valve closed
8/21/2011	7:19:21 PM	Main Vac valve closed
8/21/2011	7:19:21 PM	Bypass valve closed
8/21/2011	7:19:21 PM	H2 valve opened
8/21/2011	7:19:21 PM	Bubbler valve opened
8/21/2011	7:19:21 PM	Helium MFC set to  0.000000
8/21/2011	7:19:21 PM	H2 MFC set to  500.000000
8/21/2011	7:19:21 PM	BCl3 MFC set to  0.000000
8/21/2011	7:19:21 PM	PHl3 MFC set to  0.000000
8/21/2011	7:19:21 PM	SiCl4 MFC set to  0.000000
8/21/2011	7:19:21 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:19:21 PM	Tube furnace set to 0
8/21/2011	7:19:22 PM	Helium valve closed
8/21/2011	7:19:22 PM	BCl3 valve closed
8/21/2011	7:19:22 PM	PH3 valve closed
8/21/2011	7:19:22 PM	SiCl4 pre valve closed
8/21/2011	7:19:22 PM	SiCl4 post valve closed
8/21/2011	7:19:22 PM	Main Vac valve closed
8/21/2011	7:19:22 PM	Bypass valve closed
8/21/2011	7:19:22 PM	H2 valve opened
8/21/2011	7:19:22 PM	Bubbler valve opened
8/21/2011	7:19:22 PM	Helium MFC set to  0.000000
8/21/2011	7:19:22 PM	H2 MFC set to  500.000000
8/21/2011	7:19:22 PM	BCl3 MFC set to  0.000000
8/21/2011	7:19:22 PM	PHl3 MFC set to  0.000000
8/21/2011	7:19:22 PM	SiCl4 MFC set to  0.000000
8/21/2011	7:19:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:19:22 PM	Tube furnace set to 1000
8/21/2011	7:44:22 PM	Helium valve closed
8/21/2011	7:44:22 PM	PH3 valve closed
8/21/2011	7:44:22 PM	Main Vac valve closed
8/21/2011	7:44:22 PM	Bypass valve closed
8/21/2011	7:44:22 PM	H2 valve opened
8/21/2011	7:44:22 PM	BCl3 valve opened
8/21/2011	7:44:22 PM	SiCl4 pre valve opened
8/21/2011	7:44:22 PM	SiCl4 post valve opened
8/21/2011	7:44:22 PM	Bubbler valve opened
8/21/2011	7:44:22 PM	Helium MFC set to  0.000000
8/21/2011	7:44:22 PM	H2 MFC set to  500.000000
8/21/2011	7:44:22 PM	BCl3 MFC set to  2.500000
8/21/2011	7:44:22 PM	PHl3 MFC set to  0.000000
8/21/2011	7:44:22 PM	SiCl4 MFC set to  50.000000
8/21/2011	7:44:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:44:22 PM	Tube furnace set to 1000
8/21/2011	7:58:22 PM	Helium valve closed
8/21/2011	7:58:22 PM	BCl3 valve closed
8/21/2011	7:58:22 PM	PH3 valve closed
8/21/2011	7:58:22 PM	SiCl4 pre valve closed
8/21/2011	7:58:22 PM	SiCl4 post valve closed
8/21/2011	7:58:22 PM	Main Vac valve closed
8/21/2011	7:58:22 PM	Bypass valve closed
8/21/2011	7:58:22 PM	H2 valve opened
8/21/2011	7:58:22 PM	Bubbler valve opened
8/21/2011	7:58:22 PM	Helium MFC set to  0.000000
8/21/2011	7:58:22 PM	H2 MFC set to  500.000000
8/21/2011	7:58:22 PM	BCl3 MFC set to  0.000000
8/21/2011	7:58:22 PM	PHl3 MFC set to  0.000000
8/21/2011	7:58:22 PM	SiCl4 MFC set to  0.000000
8/21/2011	7:58:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	7:58:22 PM	Tube furnace set to 750
8/21/2011	8:03:22 PM	H2 valve closed
8/21/2011	8:03:22 PM	BCl3 valve closed
8/21/2011	8:03:22 PM	PH3 valve closed
8/21/2011	8:03:22 PM	SiCl4 pre valve closed
8/21/2011	8:03:22 PM	SiCl4 post valve closed
8/21/2011	8:03:22 PM	Main Vac valve closed
8/21/2011	8:03:22 PM	Bypass valve closed
8/21/2011	8:03:22 PM	Helium valve opened
8/21/2011	8:03:22 PM	Bubbler valve opened
8/21/2011	8:03:22 PM	Helium MFC set to  500.000000
8/21/2011	8:03:22 PM	H2 MFC set to  0.000000
8/21/2011	8:03:22 PM	BCl3 MFC set to  0.000000
8/21/2011	8:03:22 PM	PHl3 MFC set to  0.000000
8/21/2011	8:03:22 PM	SiCl4 MFC set to  0.000000
8/21/2011	8:03:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:03:23 PM	Tube furnace set to 0
8/21/2011	8:23:23 PM	Helium valve closed
8/21/2011	8:23:23 PM	H2 valve closed
8/21/2011	8:23:23 PM	BCl3 valve closed
8/21/2011	8:23:23 PM	PH3 valve closed
8/21/2011	8:23:23 PM	SiCl4 pre valve closed
8/21/2011	8:23:23 PM	SiCl4 post valve closed
8/21/2011	8:23:23 PM	Main Vac valve closed
8/21/2011	8:23:23 PM	Bypass valve closed
8/21/2011	8:23:23 PM	Bubbler valve closed
8/21/2011	8:23:23 PM	Helium MFC set to  0.000000
8/21/2011	8:23:23 PM	H2 MFC set to  0.000000
8/21/2011	8:23:23 PM	BCl3 MFC set to  0.000000
8/21/2011	8:23:23 PM	PHl3 MFC set to  0.000000
8/21/2011	8:23:23 PM	SiCl4 MFC set to  0.000000
8/21/2011	8:23:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2011	8:23:23 PM	Tube furnace set to 0
8/21/2011	8:23:24 PM	Run finished at 8:23 PM
